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Microring resonators

Main Researcher: Ilse Christiaens

In the fabrication of microring resonators we have chosen to opt for the vertical coupling approach. The different processing steps can be seen in the figure. We start out with an expitaxial layerstructure that contains an etchstop layer for substrate removal, and two core waveguide layers. The buswaveguides are etched, the sample is bonded with BCB onto a transfer substrate and the original substrate is removed. Afterwards the disk or ring is defined.

Process flow
Process flow

The next figure shows the measurement of the pass port of a 20 um radius disk resonator. Both TE and TM work nicely.
We have achieved resonators with a Q-value of around 10000.

Measurement of the pass port of 20 um radius disk
Measurement of the pass port of 20 um radius disk

The microring resonators are also thermally tunable. This is achieved by putting Cr thermistors on top of the disk resonator. Due to the low thermal conductivity of the polymer BCB that is used for bonding a very high tuning range can be achieved with low input power (15 nm with only 50 mW of input power)

Thermo-optic tuning
Thermo-optic tuning

Other people involved:

Related Research Projects

PhD thesises

Publications

    International Journals

  1. Y. Tan, Shenpu Niu, M. Billet, Nish Singh, M. Niels, T. Vanackere, Joris Van Kerrebrouck, G. Roelkens, B. Kuyken, D. Van Thourhout, Micro-transfer-printed Thin film lithium niobate (TFLN)-on- Silicon Ring Modulator, accepted for publication in ACS Photonics,  (to be published).
  2. M. Verbist, W. Bogaerts, J. Schrauwen, R. Baets, Silicon-on-Insulator-Based Retroreflective Optical Marker Chips for Simultaneous Identification and Localization, IEEE Journal of Selected Topics in Quantum Electronics, 15(5), p.1427-1431 doi:10.1109/jstqe.2009.2021567 (2009)  Download this Publication (444KB).
  3. K. De Vos, I, Bartolozzi, E, Schacht, P. Bienstman, R. Baets, Silicon-on-Insulator microring resonator for sensitive and label-free biosensing, Optics Express, 15(12), p.7610-7615 doi:10.1364/oe.15.007610 (2007)  Download this Publication (273KB).
  4. W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, R. Baets, Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires, J. Selected Topics in Quantum Electronics, 12(6), p.1394-1401 doi:10.1109/jstqe.2006.884088 (2006)  Download this Publication (799KB).
  5. I. Christiaens, G. Roelkens, K. De Mesel, D. Van Thourhout, R. Baets, Thin film devices fabricated with BCB waferbonding, Journal of Lightwave Technology, 23(2), p.517 doi: 10.1109/JLT.2004.841783 (2005)  Download this Publication (1.1MB).
  6. W. Bogaerts, P. Dumon, D. Taillaert, V. Wiaux, S. Beckx, B. Luyssaert, J. Van Campenhout, D. Van Thourhout, R. Baets, SOI Nanophotonic Waveguide Structures Fabricated with Deep UV Lithography , Photonics and Nanostructures: Fundamentals and Applications (invited), 2(2), p.81-86 doi:10.1016/j.photonics.2004.07.002 (2004)  Download this Publication (398KB).
  7. I. Christiaens, D. Van Thourhout, R. Baets, Low power thermo-optic tuning of vertically coupled microring resonators , IEE Electronics Letters, 40(9), p.560-561 doi:10.1049/el:20040331 (2004).
  8. W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, S. Beckx, Basic structures for photonic integrated circuits in Silicon-on-insulator, Optics Express (invited), 12(8), p.1583-1591 doi:10.1364/OPEX.12.001583 (2004)  Download this Publication (5.2MB).
      International Conferences

    1. R. Baets, W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, SOI Photonic Wire Based Components with Compact and Efficient Fiber Couplers , Optical Fiber Communications (invited), United States, p.OWG3 doi:10.1109/ofc.2007.4348871 (2007)  Download this Publication (594KB).
    2. K. De Vos, I. Bartolozzi, D. Taillaert, W. Bogaerts, P. Bienstman, R. Baets, E. Schacht, Optical biosensor based on silicon-on-insolator microring cavities for specific protein detection, Proc. of SPIE Photonics West (BiOS), 6447, United States, p.6447DK-1 doi:10.1117/12.698875 (2007)  Download this Publication (366KB).
    3. K. De Vos, I. Bartolozzi, P. Bienstman, R. Baets, E. Schacht, Optical Biosensor based on Silicon-on-Insulator Microring Resonators for Specific Protein Binding Detection, LEOS Benelux Annual Symposium, Netherlands, (2006)  Download this Publication (1.3MB).
    4. K. De Vos, I. Bartolozzi, P. Dumon, S. Scheerlinck, W. Bogaerts, D. Taillaert, E. Schacht, P. Bienstman, R. Baets, Silicon-on-Insulator Microring for Label-Free Biosensing , NanoBioEurope, France, (2006)  Download this Publication (1.2MB).
    5. W. Bogaerts, P. Dumon, J. Wouters, P. Jaenen, S. Beckx, V. Wiaux, D. Van Thourhout, D. Taillaert, B. Luyssaert, R. Baets, Silicon-on-Insulator Nanophotonics, SPIE Optics and Optoelectronics (invited), 5956, Poland, p.5956R-1-15 (2005)  Download this Publication (758KB).
    6. P. Dumon, I. Christiaens, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, D. Van Thourhout, R. Baets, Microring resonators in Silicon-on-insulator, ECIO 2005 , France, p.196-199 (2005)  Download this Publication (606KB).
    7. G. Morthier, R. Laroy, I. Christiaens, R. Todt, Th. Jacke, M.-C. Amann, J-O. Wesstrom, S. Hammerfeldt, T. Mullane, N. Ryan, M. Todd, New widely tunable edge-emitting laser diodes at 1.55 µm developed in the European IST-project Newton, Asia-Pacific Optical Communications, China, doi:10.1117/12.578749 (2004)  Download this Publication (710KB).
    8. I. Christiaens, D. Van Thourhout, R. Baets, Low power thermo-optic tuning of vertically coupled InP microring resonators, IPRM 2004, Japan, p.425-427 doi:10.1109/iciprm.2004.1442747 (2004).
    9. R. Baets, W. Bogaerts, Nanophotonic waveguides in SOI by means of deep UV lithography, Photonic and Electromagnetic Crystal Structures (PECS-V) (invited), Japan, p.160 (2004)  Download this Publication (234KB).
    10. P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets, Low-loss photonic wires and compact ring resonators in silicon-on-insulator, LEOS Benelux Annual Symposium 2003, Netherlands, (2003)  Download this Publication (314KB).
        National Conferences

      1. K. De Vos, I. Bartolozzi, P. Bienstman, R. Baets, E. Schacht, Optical Biosensor based on Silicon-on-Insulator Microring Resonators for Specific Protein Binding Detection, PhD Symposium, Belgium, (2006)  Download this Publication (537KB).
      2. I. Christiaens, D. Van Thourhout, R. Baets, Microring resonators as building blocks for VLSI photonics, FTW 4th PhD symposium, Belgium, (2003)  Download this Publication (1.8MB).

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