| Authors: | P. Edinger, K. Kristinsson, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K.B. Gylfason | | Title: | Silicon photonic MEMS phase shifter with us time constant built on a foundry platform | | Format: | International Conference Proceedings | | Publication date: | 5/2021 | | Journal/Conference/Book: | Conference on Lasers and Electro-Optics
| | Volume(Issue): | p.STu2Q.1 | | DOI: | 10.1364/CLEO_SI.2021.STu2Q.1 | | Citations: | Look up on Google Scholar
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Abstract
MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2pi phase shifter with a 1.54us time constant and 0.5dB insertion loss in IMEC's iSiPP50G platform. Related Research Topics
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