| Authors: | A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, J. Van Campenhout, P. Absil, D. Van Thourhout, W. Bogaerts | | Title: | Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices | | Format: | International Journal | | Publication date: | 7/2014 | | Journal/Conference/Book: | Optical Materials Express
| | Volume(Issue): | 4(7) p.1383-1388 | | DOI: | 10.1364/OME.4.001383 | | Citations: | 27 (Dimensions.ai - last update: 24/11/2024)
20 (OpenCitations - last update: 27/6/2024)
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Abstract
We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication materials and processes. Static and transient characterizations of heaters are presented. Related Research Topics
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