| Authors: | A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, D. Van Thourhout, P. Absil, W. Bogaerts | | Title: | CMOS-compatible Tungsten Heaters for Silicon Photonic Waveguides | | Format: | International Conference Proceedings | | Publication date: | 8/2012 | | Journal/Conference/Book: | 9th International Conference on Group IV Photonics
| | Volume(Issue): | p.234-236 | | Location: | San Diego, United States | | DOI: | 10.1109/group4.2012.6324144 | | Citations: | 23 (Dimensions.ai - last update: 24/11/2024)
5 (OpenCitations - last update: 10/5/2024)
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Abstract
We present a Tungsten thermo-optic tuner on SOI, using standard CMOS back-end fabrication processes. Tuning efficiency of 35.2mW/FSR was achieved on ring resonators with 10%-90% heating time of 2.8ìs. Related Research Topics
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