| Authors: | A. Witvrouw, R. Van Hoof, G. Bryce, B. Du Bois, A. Verbist, S. Severi, L. Haspeslagh, H. Osman, J. De Coster, L. Wen, R. Puers, R. Beernaert, H. De Smet, S. Rudra, D. Van Thourhout | | Title: | SiGe MEMS technology: a Platform Technology Enabling Different Demonstrators | | Format: | International Conference Proceedings | | Publication date: | 10/2010 | | Journal/Conference/Book: | 218th ECS Meeting, Las Vegas, NV
(invited)
| | Volume(Issue): | 33(6) p.799-812 | | Location: | Las Vegas, United States | | DOI: | 10.1149/1.3487610 | | Citations: | 11 (Dimensions.ai - last update: 24/11/2024)
7 (OpenCitations - last update: 3/5/2024)
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