Authors:	S. Selvaraja, K. De Vos, W. Bogaerts, P. Bienstman, D. Van Thourhout, R. Baets
Title:	Effect of Device Density on the Uniformity of Silicon Nano-Photonic Waveguide Devices
Format:	International Conference Proceedings
Publication date:	10/2009
Journal/Conference/Book:	The 22nd Annual Meeting of the IEEE Photonics Society
Editor/Publisher:	IEEE,
Volume(Issue):	p.311-312
Location:	Belek-Antalya, Turkey
DOI:	10.1109/leos.2009.5343250
Citations:	7 (Dimensions.ai - last update: 24/11/2024) 5 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We report wavelength selective device nonuniformity of 1 nm over a 200 mm SOI wafer using CMOS fabrication technology. We also report correlation between device density and nonuniformity.

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