Authors:	D. Van Thourhout, W. Bogaerts, J. Brouckaert, P. Dumon, G. Roelkens, S. Scheerlinck, S. Selvaraja, J. Schrauwen, D. Taillaert, J. Van Campenhout, P. Bienstman, R. Baets
Title:	Silicon nanophotonics on CMOS
Format:	International Conference Proceedings
Publication date:	9/2007
Journal/Conference/Book:	33rd International Conference on Micro- and Nano-Engineering 2007 (MNE07)
Volume(Issue):	p.113-114
Location:	Copenhagen, Denmark
Citations:	Look up on Google Scholar
Download:	(993KB)

Abstract

Key words: nanophotonics, deep UV lithography, CMOS, integrated prhotonics