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Publication detail
Authors:
P. Bienstman
,
P. Dumon
,
W. Bogaerts
,
D. Taillaert
,
F. Van Laere
,
K. De Vos
,
D. Van Thourhout
,
R. Baets
Title:
Silicon nanophotonics using deep-UV lithography
Format:
International Conference Proceedings
Publication date:
9/2006
Journal/Conference/Book:
APOC 2006
(invited)
Editor/Publisher:
SPIE,
Volume(Issue):
6351(99)
Location:
Kwangju, South Korea
DOI:
10.1117/12.690594
Citations:
Look up on Google Scholar
Download:
(2.4MB)
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